>> P.273
MeasurementofminuteparticlesandfloatingmatterProblem・The3Dpositionsofparticlescannotbecaptured.・Thedeeply-locatedparticlescannotbefocusedsharply.・Focusonfloatingmatterinliquidsisnotpossible.Solution・Allowsalltheparticlesspreadinawiderangetocomeintofocus.・Enablesthe3Dpositionsofspatially-movingparticlestobedeterminedfromeachfocusingposition.・TAGLENScanbeusedinmicrofluidicchannels.ProposedFunctions・AutoFocus・MultiFocus・MixedImage・TAGLENS-3DOnarobotExample:Observationofminutebubblesinglass/liquidAbsolutelyallowsobservationoftargetobjectswithalargedepthoffocus.Problem・IttakestimetoobserveaworkpiecefromvariousangleswiththeExample:inspectionusingarobot.cameramountedonarobotarm.Solution・Thelargedepthoffocuseliminatestheneedforfocusadjustmentandallowsobservationfromvariousangles,thuscontributingtotime-savingofobservation.ProposedFunctions・EDOF・MultiFocus・MixedImageAllowsinspectionofaworkpiecewiththecameramountedonarobotarm.Measurementofsemiconductoralignment*Custom-madeproduct(IRcompatible)Problem・Large-scaleequipmentandsetuphavebecomenecessaryforobservationandinspectionduetotheadoptionofchipletsystemsandmultiplelayers.Solution・DepthoffocuscanbeextendedusingTAGLENSIR.LargeZobservationrangeimagescanbeobtainedeasilyandathighspeed.ProposedFunctions・AutoFocus・MultiFocus・FocusStacking・TAGLENS-3DExample:Simultaneousobservationofalignmentmarksondifferentlayers(left)Simultaneousobservationofalignmentmarkswhenbonding(right)*Thisisacustom-madeproduct.PleasecontactMitutoyosalesofficeortradingcompanyfordetails.7-16
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